大口径碳化硅反射镜面PVD改性工艺的研究

汪建君, 袁吕军, 武中华, 周馨

汪建君, 袁吕军, 武中华, 周馨. 大口径碳化硅反射镜面PVD改性工艺的研究[J]. 应用光学, 2013, 34(5): 854-859.
引用本文: 汪建君, 袁吕军, 武中华, 周馨. 大口径碳化硅反射镜面PVD改性工艺的研究[J]. 应用光学, 2013, 34(5): 854-859.
shu
WANG Jian-jun, YUAN Lü-jun, WU Zhong-hua, ZHOU Xin. PVD Si coatings on large-aperture SiC mirror for surface-modification[J]. Journal of Applied Optics, 2013, 34(5): 854-859.
Citation: WANG Jian-jun, YUAN Lü-jun, WU Zhong-hua, ZHOU Xin. PVD Si coatings on large-aperture SiC mirror for surface-modification[J]. Journal of Applied Optics, 2013, 34(5): 854-859.
shu

大口径碳化硅反射镜面PVD改性工艺的研究

  • 1.

    中国科学院国家天文台 南京天文光学技术研究所,江苏 南京 210042;

  • 2.

    中国科学院 天文光学技术重点实验室,江苏 南京 210042;

  • 3.

    中国科学院大学,北京 100049

详细信息
    通讯作者:

    汪建君（1988-），男，山东德州人，硕士研究生，主要从事光学工艺方面的研究工作。 Email: jjwang@niaot.ac.cn

  • 中图分类号: TN205; TB332

PVD Si coatings on large-aperture SiC mirror for surface-modification

  • 1.

    National Astronomical Observatories/Nanjing Institute of Astronomical Optics &Technology,CAS,Nanjing 210042,China;

  • 2.

    Key Laboratory of Astronomical Optics &Technology,Nanjing Institute of Astronomical Optics&Technology,CAS,Nanjing 210042,China;

  • 3.

    University of Chinese Academy of Sciences,Beijing 100049,China

摘要

    摘要
  • 摘要: 通过将多块不同尺寸的碳化硅平面试片以及一块口径为520mm碳化硅凹非球面反射镜作为镜面改性工艺技术的实验平台，对大口径碳化硅反射镜面PVD改性工艺技术进行探索、分析和研究。重点研究了前期PVD改性前镜面特性与PVD改性层的最佳匹配关系，主要是PVD改性层与镜面粗糙度和残留面形误差的要求和最佳结合点。采用的抛光方式为磨盘相对镜体做行星运动，采用相同的离子束辅助沉积法进行凹椭球面碳化硅反射镜的镜面改性。实验结果表明：通过选用合适的方案对改性后的PVD改性层镜面的面形误差进行修抛，可同时提高其镜面光洁度和粗糙度，最终测试结果为0.756　nm（Sq），与改性前比较，粗糙度得到一定程度的提高。
    Abstract: Experiments on polishing and surface-modification of an aspheric surface silicon carbide (SiC) mirror with 520 mm diameter and some SiC plane mirrors with different diameters were carried out, the technology of surface-modification was analyzed and discussed in detail. The effect of surface-modification (ion beam assisted deposition) on optical properties of SiC mirrors was researched. Several types of association scheme were constituted by combining the physical and chemical behavior of physical vapor deposition (PVD) coatings with the mirror polishing technique, the PVD coatings- requirements for the surface properties before surface-modification and the optimum combining site between them were mainly studied. Results show that the polish of modified surface with suitable plan can both improve the surface error and roughness. The surface roughness of 520 mm aspheric surface SiC mirror is 0.756 nm (Sq). Compared with the surface before modified, the roughness is improved.
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    • 参考文献(1)
  • ［1］YUAN Lu-jun, WANG Bin- Optical surfacing of reflecting SiC mirrors of 520mm R-C system[J]. SPIE, 2006, 6149: 61493N-1-61493N-5.
    [2]申振峰，高劲松，陈红，等. 空间用SiC反射镜表面改性的性能和可靠性评估[J]. 光子学报, 2009, 38(9): 2353-2358.
    SHEN Zhen-feng, GAO Jin-song, CHEN Hong, et al. Performance and reliability evaluation for the surface modification of space used silicon carbide mirror[J]. Acta Photonica Sinica, 2009, 38(9): 2353-2358. (in Chinese with an English abstract)
    [3]张峰，徐领娣，范镝，等. 表面改性非球面碳化硅反射镜的加工[J]. 光学精密工程, 2008, 16(12): 2479-2484.
    ZHANG Feng, XU Ling-di, FAN Di, et al. Fabrication of surface modification aspheric SiC mirror[J]. Optics and Precision Engineering, 2008, 16(12): 2479-2484. (in Chinese with an English abstract)
    [4]陈红，高劲松，宋琦，等. 离子辅助制备碳化硅改性薄膜[J]. 光学精密工程, 2008, 16(3): 381-385.
    CHEN Hong, GAO Jin-song, SONG Qi, et al. Si modified coating on SiC substrate by ion beam assisted deposition[J]. Optics and Precision Engineering, 2008, 16(3): 381-385. (in Chinese with an English abstract)
    [5]徐清兰，伍凡，吴时彬，等. 轻质碳化硅平面反射镜超光滑表面加工[J]. 光电工程, 2004, 31(9): 22-25.
    XU Qing-lan, WU Fan, WU Shi-bin, et al. Supermooth surfacing fabrication for lightweight silicon carbide plan mirror[J]. Opto-Electronic Engineering, 2004, 31(9): 22-25. (in Chinese with an English abstract) 
    [6]潘君骅. 光学非球面的设计、加工与检验[M]. 苏州：苏州大学出版社, 2004: 1-9.
    PAN Jun-hua. The design, manufacture and test of the aspherical optical surfaces[M]. Suzhou: Soochow University Press, 2004: 1-9. (in Chinese)
    [7]JONES R A. Optimization of computer controlled polishing[J]. Applied Optics, 1977, 6(1): 213-224.
    [8]袁吕军，陈韬. 高次非球面的工艺技术研究[J]. 应用光学, 2011, 32(2): 335-342.
    YUAN Lu-jun, CHEN Tao. Manufacturing technology for high order aspheric surface[J]. Journal of Applied Optics, 2011, 32(2): 335-342. (in Chinese with an English abstract)
    [9]朱政，高必烈，李新南，等. 主动抛光盘磨制非球面的工艺与面形检测[J]. 光学技术, 2005, 31(3): 341-343.
    ZHU Zheng, GAO Bi-lie, LI Xin-nan, et al. Optical technology and testing method using stressed lap to polish asphere[J]. Optical Technique, 2005, 31(3): 341-343. (in Chinese with an English abstract)
    [10]王权陡，余景池，张峰. 数控抛光中不同运动方式下小抛光盘抛光特性之比较[J]. 光学精密工程, 1999, 7(5): 73-79.
    WANG Quan-dou, YU Jing-chi, ZHANG Feng. Polishing performance comparison of small polishing pad worked in different motion model in computer controlled optical polishing[J]. Optics and Precision Engineering, 1999, 7(5): 73-79. (in Chinese with an English abstract)
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  • 刊出日期:  2013-09-14

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