基于二维傅里叶变换的单帧干涉图相位提取方法

Phase extraction for single frame interferogram-based on 2D Fourier transform

  • 摘要: 针对大口径光学元件干涉测试过程中,测试装置和干涉腔长较大,气流扰动和环境振动对移相测试过程产生影响等问题,采用一种基于二维傅里叶变换的单帧干涉图处理方法,只需要对一幅空间载频干涉条纹图进行处理即可获得待测相位,具有抗振测试的优点。对该方法的基本原理和算法过程进行分析,并对近红外大口径移相平面干涉仪中600 mm口径的光学平晶进行了面形测试。实验结果表明:采用该方法所得波面峰谷值(PV)为0.112,波面均方根值(RMS)为0.014,与移相算法所得波面数据相比,波面峰谷值偏差不到(1/500);波面均方根值(RMS) 偏差几乎为零。

     

    Abstract: For the interferometric testing of optical elements with large aperture, due to large testing device and interferometric cavity length, the process of phaseshifting interferometry was affected by airflow disturbance and environmental vibration. In order to overcome the above factors, a single interferogram processing method based on two-dimensional fast Fourier transform(FFT) was proposed. This method only required one single spatial carrier fringe pattern to obtain the phase, which had the advantage of anti-vibration testing. The basic principle and the process of algorithm were analyzed, and the optical element with 600 mm large aperture in the near-infrared phase-shifting Fizeau interferometer was tested. Experimental results show that the peaktovalley (PV) value and root mean square (RMS) value of the wavefront obtained by FFT method are 0.112 and 0.014 respectively, compared with the results obtained by phase-shifting method, there are a difference less tham (1/500) in PV and almost zero difference in RMS.

     

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