Abstract:
For the interferometric testing of optical elements with large aperture, due to large testing device and interferometric cavity length, the process of phaseshifting interferometry was affected by airflow disturbance and environmental vibration. In order to overcome the above factors, a single interferogram processing method based on two-dimensional fast Fourier transform(FFT) was proposed. This method only required one single spatial carrier fringe pattern to obtain the phase, which had the advantage of anti-vibration testing. The basic principle and the process of algorithm were analyzed, and the optical element with 600 mm large aperture in the near-infrared phase-shifting Fizeau interferometer was tested. Experimental results show that the peaktovalley (PV) value and root mean square (RMS) value of the wavefront obtained by FFT method are 0.112 and 0.014 respectively, compared with the results obtained by phase-shifting method, there are a difference less tham (1/500) in PV and almost zero difference in RMS.