光学材料光学不均匀性绝对测量误差分析

李强; 刘昂; 高波; 徐凯源; 柴立群

光学材料光学不均匀性绝对测量误差分析

1.
成都精密光学工程研究中心,四川成都 610041

详细信息

通讯作者:
李强 (1979-)，男，四川达州人，助理研究员，主要从事光学检测方面的研究工作 Email:ocean_leon@126.com

中图分类号: TN29;O436.1
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出版历程
- 刊出日期: 2013-05-15

Error analysis of absolute test method of inhomogeneity of optical materials

1.
Fine Optical Engineering Research Center,Chengdu 610041,China

摘要

摘要: 绝对测量技术去除了干涉仪参考面面形误差，可实现光学材料光学不均匀性的高精度测量。对现有主要光学材料光学不均匀性绝对检测技术进行了总结比较，针对像素错位、干涉图分辨率、干涉仪测量重复性、样品厚度以及折射率测量等因素对光学不均匀性绝对检测的影响进行了实验分析。实验结果表明：干涉仪重复性是光学不均匀性测量的主要误差。样品翻转测量法、样品直接透射测量法、平行平板样品测量法3种测量方法均可实现光学不均匀性（RMS）10-8检测精度。
- 测量 /
- 光学不均匀性 /
- 绝对检测 /
- 误差分析
Abstract: Absolute test eliminates the surface errors of reference plane of interferometer, so that the inhomogeneity of optical materials can be measured with high accuracy. A brief review and comparison of several mainstream absolute test methods for inhomogeneity of optical material were given. And influence of the factors, such as the pixel offset, resolution of interference pattern, repetition of interferometer, the sample thickness and the refractive index measurement, etc, on the measurement error of absolute test was analyzed respectively. Experimental results indicate that the measuring accuracy of window-flipping method, transmission method and parallel flat method can reach 10-8 respectively. Repetition of interferometer is the main error in absolute test method of the inhomogeneity of optical materials.
- measurement /
- optical inhomogeneity /
- absolute test /
- error analysis

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参考文献(1)

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