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双目视觉DIC测量系统的离面位移测量精度

冯秀 陈旭 徐楠 陈凡秀 谢欣 杨连祥

冯秀, 陈旭, 徐楠, 陈凡秀, 谢欣, 杨连祥. 双目视觉DIC测量系统的离面位移测量精度[J]. 应用光学, 2013, 34(3): 457-462.
引用本文: 冯秀, 陈旭, 徐楠, 陈凡秀, 谢欣, 杨连祥. 双目视觉DIC测量系统的离面位移测量精度[J]. 应用光学, 2013, 34(3): 457-462.
FENG Xiu, CHEN Xu, XU Nan, CHEN Fan-xiu, XIE Xin, YANG Lian-xiang. Measurement accuracy of out-of-plane displacement forbinocular vision DIC system[J]. Journal of Applied Optics, 2013, 34(3): 457-462.
Citation: FENG Xiu, CHEN Xu, XU Nan, CHEN Fan-xiu, XIE Xin, YANG Lian-xiang. Measurement accuracy of out-of-plane displacement forbinocular vision DIC system[J]. Journal of Applied Optics, 2013, 34(3): 457-462.

双目视觉DIC测量系统的离面位移测量精度

详细信息
    通讯作者:

    冯秀(1975-),女,江苏徐州人,博士研究生,副教授,主要从事流体密封与光学测控技术研究工作。 Email:fxsue@163.com

  • 中图分类号: TN206; O438.1

Measurement accuracy of out-of-plane displacement forbinocular vision DIC system

  • 摘要: 采用离面位移测量精度达到10 nm~20 nm的电子散斑干涉测量系统验证了双目视觉数字散斑相关测量系统的离面位移测量精度。分别用电子散斑干涉测量系统和双目视觉数字散斑相关测量系统同时测量了平板离面位移,并对所测量的位移最大值进行了分析处理及比较。结果表明,双目视觉数字散斑相关测量系统的物体离面位移分布云图与电子散斑干涉测量系统的结果基本相同,且两者位移均方根相差为2.76 m~3.56 m,相对误差为4.59%~7.60%。因此,当被测量物体的离面位移大于4 m时,双目视觉Q400测量系统精度可达到电子散斑干涉测量系统的精度。
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  • 刊出日期:  2013-05-15

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