紫外光学传递函数测量装置研究

Study of ultraviolet optical transfer function measurement equipment

摘要: 光学传递函数是评价光学系统成像质量的重要指标，针对目前光学传递函数测量只能覆盖可见光和红外波段，自行研制了紫外波段(260 nm～400 nm)光学传递函数（OTF）测量装置。介绍了装置的原理及组成，采用中心波长为0=300 nm和0=380 nm 2种OTF标准镜头在2个光谱范围内对OTF测量装置进行了标定和测试，结果表明：调制传递函数（MTF）的测量值与理论值的偏差：0.03（轴上）；0.05（轴外）。最后，对装置的测量不确定度进行了评估。

Abstract: The optical transfer function (OTF) is an important parameter of image quality for optical system. As modern OTF measurement equipments just covered visible light and infrared band, the ultraviolet OTF (260 nm~400 nm) measurement equipment was designed. The theory and the components of the testing equipment were introduced. The equipment was calibrated by the OTF standard lens with centric wavelengths of 300 nm and 380 nm. The results show that the errors between theory and measurement of MTF are 0.03 (on-axis) and 0.05 (off-axis). Finally, the uncertainty of equipment measurement is evaluated.