双面对称角度楔形镜的超光滑表面加工方法

Ultra-smooth surface processing method of wedge mirrorwith double-symmetric angle

  • 摘要: 对两个通光面均为超光滑表面的双面对称角度楔形镜的加工提出了一种新工艺方法,并根据零件的特点对工艺方法进行了改进。利用组合楔板工装、粘接上盘等方式对零件进行成盘加工,不仅使零件的角度、厚度得到了很好的保证,而且还避免了光胶上盘对已加工表面的损伤,使通光面的疵病、面形、粗糙度、一致性等指标有很大的改善,超光滑表面粗糙度rms均优于0.2 nm (AFM测量),表面疵病达到0级,角度精度达到15,一次交检合格率达到85%以上,有效地解决了生产中的瓶颈问题。

     

    Abstract: A new processing method of wedge mirror with double-symmetric angle which has two ultra-smooth surfaces was presented. According to the characteristics of the optical elements, the traditional processing method was improved. The elements were processed by using the way of wedge plate combination tooling and bonding. The flaw, figure, roughness and consistency of optical surface were greatly improved. The root mean square (RMS) roughness of ultra-smooth surface was always better than 0.2 nm (AFM measurement), the surface defect reached 0 level, the angle precision was 15, and the qualification ratio under first acceptance check was above 85%. This method can effectively solve the bottleneck problem in production.

     

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