非球面数字波面检测技术

袁吕军; 杨帆

非球面数字波面检测技术

袁吕军^1,2, ,,
杨帆^1,2,3

1.
中国科学院国家天文台南京天文光学技术研究所,江苏南京 210042;
2.
中国科学院天文光学技术重点实验室,江苏南京 210042;
3.
中国科学院研究生院,北京 100049

详细信息

通讯作者:
袁吕军（1961-），男，江苏泰州人，研究员，主要从事非球面光学工艺与检测研究工作。

中图分类号: TN205；TN247
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出版历程
- 刊出日期: 2012-11-14

Method of digital wavefront for testing asphere

YUAN Lü-jun^1,2, ,,
YANG Fan^1,2,3

1.
Nanjing Institute of Astronomical Optics &Technology /National Astronomical Observatories,CAS,Nanjing 210042,China;
2.
Key Laboratory of Astronomical Optics &Technology,CAS,Nanjing 210042,China;
3.
Graduate University of Chinese Academy of Sciences,Beijing 100049,China

摘要

摘要: 提出了一种快速检测浅度非球面（非球面度小于0.01 mm）的方法，该方法无需补偿器或其他辅助光学元件进行零位补偿。用移相干涉仪直接测量正轴或离轴的浅度凹非球面，剔除平移、倾斜、失焦等调整误差后，得到实际被测镜面的面形分布数据；根据正轴或离轴的浅度凹非球面矢高方程计算理想非球面的面形分布数据，得到理论波面数据，用实测的面形分布数据减去理论的面形分布数据即可得到被检非球面的剩余波像差，即面形误差。利用该方法测量了一口径为135 mm的双曲面，并用零位补偿法加以验证。两种方法的检测结果精度相当，说明数字波面法可实际应用于正轴或离轴的浅度凹非球面的检测。
- 光学检测 /
- 非球面 /
- 数字波面 /
- 波像差
Abstract: A method for fast testing aspheric surface with small asphericity (less than 0.01 mm) was proposed, which does not need compensation system or other optical elements. First the practical wavefront aberration was measured by phase-shifting interferometer, and the adjustment errors were eliminated. Then the theoretical wavefront aberration of aspheric surface on-axis or off-axis was calculated based on the equation of aspheric surface. At last the residual wavefront aberration (surface error) was obtained by subtracting the theoretical wavefront from practical wavefront. A hyperboloidal mirror with the diameter of 135 mm was measured by this method, meanwhile this mirror was tested by null compensation; the tested results by these two methods are similar. It concludes that the method of digital wavefront for testing aspheric surface is feasible.
- optical testing /
- aspheric surface /
- digital wavefront /
- wavefront aberration

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参考文献(1)

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非球面数字波面检测技术

通讯作者:
袁吕军（1961-），男，江苏泰州人，研究员，主要从事非球面光学工艺与检测研究工作。

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Method of digital wavefront for testing asphere

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非球面数字波面检测技术

通讯作者: 袁吕军（1961-），男，江苏泰州人，研究员，主要从事非球面光学工艺与检测研究工作。

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Method of digital wavefront for testing asphere

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通讯作者:
袁吕军（1961-），男，江苏泰州人，研究员，主要从事非球面光学工艺与检测研究工作。