Excimer laser power standard detector
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摘要: 采用高热导率碳化硅陶瓷作为吸收体材料，基于厚膜技术制作电热单元，研制了10 mW～1 W电校准准分子激光功率标准器，基于电替代法实现激光功率量值复现，量值复现不确定度达到0.26%（k=1）。在脉冲激光条件下对SiC陶瓷和几种常用的面吸收体材料进行了激光损伤测试，结果显示高热导率SiC陶瓷具有较高的抗损伤性能，设计的锥形结构吸收体在248 nm准分子激光条件下能量损伤阈值为2.2 J/cm2。在多波长下基于积分球系统测量了腔体吸收率，介绍了248 nm准分子激光条件下吸收率测量方法，设计的腔体在几种波长下吸收率大于0.99。基于电校准法实验测量了标准器的光电等效性，灵敏度光电不等效修正因子为1.002 6。Abstract: Thermal detector of 10 mW~1 W with SiC ceramic absorbing material and thick film electric heater for excimer laser power measurement is reported. Uncertainty for value reproduce reaches 0.26% (k=1). Laser pulse energy damage threshold of SiC ceramic and other common absorbing materials were studied. Threshold of the cavity used in the detector at 248 nm excimer laser condition is 2.2 J/cm2. Cavity absorbance under different wavelengths was also investigated through integrating sphere system and method for absorbance measurement at 248 nm excimer laser condition is presented. Absorbance of designed cavity is more than 0.99 at tested wavelength. The detector-s opto-electric equivalence was tested based on electric substitute and the unequivalence factor for sensitivity is 1.0026.
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