三维轮廓扫描法测量透镜曲率半径的实验研究

定翔; 李飞; 洪宝玉

三维轮廓扫描法测量透镜曲率半径的实验研究

中国计量科学研究院医学与生物计量研究所,北京 100013

详细信息

通讯作者:
定翔（1984-），男，湖北洪湖人，助理研究员，博士，主要从事球面和非球面参数计量研究。

中图分类号: TN207; TH741
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出版历程
- 刊出日期: 2012-07-14

Curvature radius measurement by three-dimension profilometry

Division of Medical and Biological Measurement,National Institute of Metrology,Beijing 100013,China

摘要

摘要: 三维轮廓扫描方法可通过连续扫描透镜表面三维空间形貌，拟合得到其曲率半径值。该方法具有测量精度高、可任意选定测量区域、测量力微弱、对光学表面划伤可忽略等优点。通过实验，研究了三维轮廓扫描法测量透镜曲率半径的精度，并分析了测量区域大小、扫描间距等因素对测量精度的影响。实验结果表明，该方法测量凸、凹球面透镜的曲率半径的相对重复性可达到110-6。
- 曲率半径测量 /
- 三维轮廓扫描 /
- 重复性标准差 /
- 最小二乘拟合
Abstract: Accurate measurement of curvature radius can be realized by three-dimension profilometry by scanning and fitting the surface topography of lenses. It takes the advantages of high accuracy, variable scanning area, tiny contact force and neglectable scratch to optical surface. Precision of curvature radius measurement by three-dimension profilometry is investigated, as well the influence of scanning area size and scanning intervals on the precision are discussed. Experimental results indicate that the standard deviation of relative repeatability can achieve as high as 110-6 in curvature radius measurement in both convex and concave lenses.
- curvature radius measurement /
- three-dimension profilometry /
- standard deviation of repeatability /
- least square fitting

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参考文献(1)

［1］徐昌杰, 潘永强. 利用迈克尔逊干涉仪测量光学球面的曲率半径［J］. 西安工业学院学报, 2002, 22(1): 31-34.

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［4］HAO Q, ZHU Q, HU Y. Random phase-shifting interferometry without accurately controlling or calibrating the phase shifts ［J］. Optics Letters, 2009, 34(8): 1288-1290.

［5］杨文国, 赵维谦, 金国量,等. 球体半径超精测量系统研究［J］. 航天工艺, 2001(2):10-14.

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文章访问数: 2992
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PDF下载量: 655
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三维轮廓扫描法测量透镜曲率半径的实验研究

通讯作者:
定翔（1984-），男，湖北洪湖人，助理研究员，博士，主要从事球面和非球面参数计量研究。

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Curvature radius measurement by three-dimension profilometry

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三维轮廓扫描法测量透镜曲率半径的实验研究

通讯作者: 定翔（1984-），男，湖北洪湖人，助理研究员，博士，主要从事球面和非球面参数计量研究。

计量

出版历程

Curvature radius measurement by three-dimension profilometry

计量

出版历程

目录

相关数据库

广告合作

友情链接

帮助中心

通讯作者:
定翔（1984-），男，湖北洪湖人，助理研究员，博士，主要从事球面和非球面参数计量研究。