中红外带通滤光片的设计与制备

陈朝平; 师建涛; 郭芮; 白波; 杨崇民; 郭鸿香

中红外带通滤光片的设计与制备

1.
西安应用光学研究所,陕西西安 710065;
2.
驻西安北方光电集团军事代表室,陕西西安 710065

详细信息

通讯作者:
陈朝平（1978-），男，陕西兴平人，硕士，工程师，主要从事光学薄膜技术研究工作。

中图分类号: TN205;O484.4
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出版历程
- 刊出日期: 2012-05-15

Design and preparation of mid-infrared bandpass filter

1.
Xi-an Institute of Applied Optics,Xi-an 710065,China;
2.
The PLA Military Representative Agency at North Electro-Optics Group Co.Ltd.,Xi-an 710065,China

摘要

摘要: 中红外带通滤光片在航天、气象、遥感等领域有着重要的应用，峰值透过率和通带半宽度是带通滤光片的重要指标，主要取决于光学薄膜的膜系结构和具体设计。论述了一种在锗基底上采用锗和硫化锌两种材料设计并成功制备出中红外带通滤光片的方法。详细介绍了镀膜材料的选择以及这种方法的设计理论，给出了膜系结构，运用离子辅助沉积工艺在ZZSX-1100镀膜机上制备出了这种滤光片，测试结果表明：所制备的滤光片峰值透过率达到87%以上，通带半宽度为70 nm，光谱性能稳定，膜层致密，附着力好，膜系结构简单，易于实现。
- 中红外带通滤光片 /
- 薄膜 /
- 离子辅助沉积 /
- 通带半宽度 /
- 峰值透过率
Abstract: The mid-infrared bandpass filter is widely used as an observation channel in applications such as flight, meteorology and remote sensing. The peak transmission and full width at half maximum (FWHM) are key specifications of the bandpass filter, which depend on the film structure and its design.The midinfrared bandpass filter was successfully prepared using a new method with Ge and ZnS materials on Ge substrate. The selection of materials and the design principles of this method were introduced in detail, the film structure is also given. By using ZZSX-1100 device, this kind of filter was deposited with ion beam assisted process. The mea-surement results show that its peak transmission is more than 87% and the FWHM is 70 nm. The filter has good optical spectrum stability and adherence. The film structure is simple and easy to implement.
- mid-infrared bandpass filter /
- thin films /
- ion beam assisted deposition(IBAD) /
- full width at half maximum (FWHM) /
- peak transmission

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参考文献(1)

［1］张佰森, 陈寿, 熊玉卿, 等. 中波红外短波通滤光片的设计与镀制技术研究［J］. 真空与低温, 2010, 16(3): 148-152.

ZHANG Bai-sen, CHEN Tao, XIONG Yu-qing, et al. Design and preparation of medium-wave infrared short-wavelength pass filter［J］. Vacuum & Cryogenics, 2010, 16(3): 148-152. (in Chinese with an English abstract)

［2］查家明, 李斯成, 唐乾隆. 红外中带滤光片的结构带宽估算及调整［J］. 应用光学, 2007, 28(2): 151-155.

ZHA Jia-ming, LI Si-cheng, TANG Qian-long. Structure bandwidth estimation and adjustment of medium bandpass infrared filter［J］. Journal of Applied Optics, 2007, 28(2): 151-155. (in Chinese with an English abstract)

［3］付秀华, 董连和, 付新华, 等. 红外增透与保护膜技术的研究［J］. 激光与红外, 2006, 36(12): 1162-1164.

FU Xiu-hua, DONG Lian-he, FU Xin-hua, et al. Study of infrared AR and protecting coating technology［J］. Laser & Infrared, 2006, 36(12): 1162-1164. (in Chinese with an English abstract)

［4］唐晋发, 顾培夫, 刘旭, 等. 现代光学薄膜技术［M］. 杭州: 浙江大学出版社, 2006.

TANG Jin-fa, GU Pei-fu, LIU Xu, et al. Modern optical thin-film technology［M］. Hangzhou: Zhejiang University Press, 2006. (in Chinese)

［5］严一心, 林鸿海. 薄膜技术［M］. 北京: 兵器工业出版社, 1994.

YAN Yi-xin, LIN Hong-hai. Thin-film technology［M］. Beijing: Weapon Industry Press, 1994. (in Chinese)

［6］潘永强, 杭凌侠, 梁海峰, 等. 硒化基底2～16μm超宽带硬质红外增透膜的研制［J］. 光学学报, 2010, 30(4): 1201-1204.

PAN Yong-qiang, HANG Ling-xia, LIANG Hai-feng, et al. Ultra-broad band and hard infrared antireflection coatings on ZeSe for 2~16μm［J］. Acta Optica Sinica, 2010, 30(4): 1201-1204. (in Chinese with an English abstract)

［7］闫兰琴, 张树玉, 黎建明, 等. ZnSe基底7～14μm波段宽带增透膜［J］. 激光与红外, 2009, 39(2): 210-212.

YAN Lan-qin, ZHANG Shu-yu, LI Jian-ming, et al. Study on high performance infrared wide-band (7~14μm) antireflective film on ZnSe substrate［J］. Laser & Infrared, 2009, 39(2): 210-212. (in Chinese with an English abstract)

［8］白胜元, 顾培夫, 刘旭, 等. 薄膜滤光片的光学稳定性研究［J］. 光子学报, 2001, 30(5): 576-580.

BAI Sheng-yuan, GU Pei-fu, LIU Xu, et al. Study on optical stability of thin-film filters［J］. Acta Photonica Sinica, 2001, 30(5): 576-580. (in Chinese with an English abstract)

［9］赵兴梅, 师建涛, 郭鸿香. 一种红外双半波滤光片的设计和制造方法［J］. 应用光学, 2006, 27(3): 208-210.

ZHAO Xing-mei, SHI Jian-tao, GUO Hong-xiang. Design and fabrication of infrared double half-wave filter［J］. Journal of Applied Optics, 2006, 27(3): 208-210. (in Chinese with an English abstract)

［10］朱震. 光学薄膜在激光与红外技术中的应用［J］. 激光与红外, 2006, 36(增刊): 792-796.

ZHU Zhen. Application of optical films in laser and infrared technology［J］. Laser & Infrared, 2006, 36(Sup): 792-796. (in Chinese with an English abstract)

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