扩展铟镓砷标准探测器研制与响应度定标

    Development and responsivity calibration of extended InGaAs standard photodetector

    • 摘要: 光电探测器的光谱响应度定标对其广泛的应用具有重要意义。然而,近红外波段尤其是(1600~2300)nm范围内的光电探测器,因感光面积小(Φ≤3mm)且响应不均匀,难以实现高精度的光谱响应度定标。阐述了一种新型扩展铟镓砷标准探测器的设计与研制,并实现了其光谱响应度定标。首先,通过仿真模拟研究了积分球结构对标准探测器均匀性的影响。其次,根据仿真结果分别研制了积分球耦合单探测器与双探测器,并搭建了探测器均匀性测量装置。均匀性测量结果分别为0.4%(单探测器)和0.2%(双探测器),与仿真结果一致。最后,针对积分球耦合双探测器搭建了基于热释电功率计的光谱响应度定标装置,进行了(1200~2300)nm波段的光谱响应度定标。通过积分球扩展铟镓砷探测器的设计与实验验证,解决了近红外波段缺乏标准光电探测器的难题。

       

      Abstract: The spectral responsivity calibration of photodetectors is of great significance for their widespread applications. However, in near-infrared band, particularly within the range of (1600~2300)nm, conventional photodetectors were found to suffer from small photosensitive areas (Φ≤3 mm) and non-uniform spatial response, which severely hindered high-precision spectral responsivity calibration. To address this issue, a novel extended InGaAs standard detector was designed and developed presented, and its spectral responsivity calibration was successfully realized. First, the influence of integrating sphere structure on detector's response uniformity was investigated through numerical simulations. Subsequently, based on simulation results, both an integrating-sphere-coupled single detector and a dual-detector configuration were fabricated, and a corresponding uniformity measurement setup was established. The measured uniformity results were 0.4% (single detector) and 0.2% (dual-detector), which were consistent with the simulation results. Furthermore, a spectral responsivity calibration system based on a pyroelectric power meter was constructed for integrating-sphere-coupled dual detector, and the spectral responsivity calibration was successfully performed over (1600~2300)nm wavelength range. Through the design and experimental validation of integrating-sphere-extended InGaAs detector, the challenge of lacking standard photodetectors in near-infrared band is effectively resolved.

       

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