基于投影畸变校正的大口径动态干涉仪高精度主镜检测

    High-precision primary mirror testing for large-aperture dynamic interferometers based on projection distortion correction

    • 摘要: 大口径泰曼式动态干涉仪以高精度系统主镜为核心元件,在仪器补偿检测中,检测波像差与待测镜面形之间存在投影畸变,须予以校正以保证系统主镜补偿加工的精度和效率。针对畸变校正方法复杂繁琐,忽略干涉仪内部光路影响的问题,提出一种融合仿射变换与径向畸变建模的校正方法。该方法利用少量靶标及三坐标测量仪建立仿射模型,基于光学设计软件接口的二次编程开发,实现大规模光线追迹与径向畸变拟合,快速、准确地重构干涉波前分布,并分析装调误差与畸变校正面形误差的解耦方法。采用该方法对有效口径Φ450 mm主镜非球面的补偿检测结果进行投影畸变校正,基于校正结果指导系统主镜磁流变补偿加工,干涉仪空腔波前均方根由0.1093λ收敛至0.0104λ,降低了90.48%,优于未校正的补偿加工收敛比率,实验结果验证了该方法的有效性。

       

      Abstract: A large-aperture Twyman–Green dynamic interferometer employs a high-precision primary mirror as its core component. Projection distortion between measured wavefront and actual surface figure of the mirror must be corrected to ensure the accuracy and efficiency of primary mirror’s compensation fabrication. To address issues of cumbersome and complex distortion correction methods that often neglect influence of internal optical path of interferometer, a correction method combining affine transformation and radial distortion modeling was proposed. Using a small number of targets and a coordinate measuring machine (CMM), an affine model was established. Through secondary programming development based on interface of optical design software, large-scale ray tracing and radial distortion fitting were performed to reconstruct interferometric wavefront distribution quickly and accurately. A decoupling method between alignment errors and surface figure errors after distortion correction was also analyzed. The proposed method was applied to correct projection distortion in compensation test results of an aspheric primary mirror with an effective aperture of Φ450 mm. Based on corrected results, magnetorheological finishing compensation of primary mirror was guided. The interferometric cavity wavefront root mean square (RMS) converged from 0.1093λ to 0.0104λ, which decreased by 90.48%, outperformed the convergence ratio achieved without distortion correction. Experimental results validate the effectiveness of the proposed method.

       

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