三维空间原位激光动态聚焦扫描系统仿真设计

    Simulation design of three-dimensional in-situ laser dynamic focusing scanning system

    • 摘要: 为了满足激光三维扫描在加工范围、精度和加工效率方面日益增长的需求,提出一种可实现1.5 m×1.5 m×0.4 m的扫描范围,聚焦光斑半径均小于50 μm的三维空间原位激光动态聚焦扫描系统仿真设计方法。通过同时控制动态调整镜沿光轴的移动以及平面反射镜在球坐标系中沿X、Y轴的定心偏转,系统可实现在三维空间原位激光聚焦扫描;采用多种镜片的组合设计,降低了光线通过聚焦镜头各镜片时的发散角,显著提高了系统的稳定性,并降低了对镜片加工、装配及控制公差的要求。实验结果表明:系统能够满足设计要求,最长焦距超过2.1 m,聚焦光斑的均方根(RMS)半径均小于26 μm,且具有较高的圆度。对动态调整镜的轨迹和反射镜的偏转角度与系统后工作距离进行拟合,可实现对系统控制并提高激光扫描速率。对系统的衍射圈入能量、波前及物理光学传播照度进行了分析,证明了系统在各聚焦位置均接近衍射极限。分析了镜片加工、装配及控制公差对系统的影响,在可实际达到的合理公差范围内,聚焦光斑在完整扫描空间内的RMS半径均符合设计要求,且具有较好的一致性。最后,基于系统的光学设计方案,提出了相应的机械结构实现方案和控制策略。研究结果对扩展三维空间激光扫描技术的应用具有实际价值。

       

      Abstract: To address the growing demands for three-dimensional laser scanning in terms of processing range, accuracy, and efficiency, a three-dimensional in-situ laser dynamic focusing scanning system was proposed for the first time in this research. It could achieve a scanning range of 1.5 m×1.5 m×0.4 m, and the focusing spot radii were smaller than 50 μm. By controlling the movement of the dynamic adjustment lens along the optical axis and the centering deflection of the plane mirror along the X and Y axis within a spherical coordinate system, the system enabled in-situ laser focusing scanning in three-dimensional space. The combined design of multiple lenses reduced the divergence angle of light passing through the focusing lenses, significantly enhanced the stability of system and reduced the precision requirements for lens processing, assembly, and control tolerances. Experimental results demonstrated that the system can meet the design specifications, with a maximum focal length exceeding 2.1 m, the root mean square (RMS) radius of the focused spot below 26 μm and having a high roundness. The trajectory of the dynamic adjustment lens and the deflection angle of the mirror were tailored to the working distance of the system, facilitating the control of the system and improving the laser scanning rate. Further analysis of the system's optical and physical propagation, including diffraction energy, wavefront, and illumination, confirmed that the system was operated close to the diffraction limit at each focusing position. The impact of lens processing, assembly, and control tolerances on the system was also analyzed, revealing that the RMS radius of the focused spot across the entire scanning space meet design requirements and maintained good consistency within achievable practical tolerance ranges. Finally, based on the optical design scheme of the system, the corresponding mechanical structure realization scheme and control strategy were proposed. This study provides important guidance for the design of laser dynamic focusing scanning optical system, and has significant practical values for expanding the application of three-dimensional laser scanning technology.

       

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