用于地表温度探测10 μm~11 μm带通滤波器的研制

Development of 10 μm~11 μm bandpass filter for surface temperature detection

  • 摘要: 多谱段光谱成像仪搭载长波红外探测器可以提供空间高分辨率的地表温度信息,研究地表温度在全球能量平衡和气候变化中具有重要意义。本文采用10 μm~11 μm滤波器作为红外探测器的窗口进行地表温度探测,分别采用Ge和ZnS作为高低折射率材料,在Ge基板上设计一种宽截止、高透射的长波红外带通滤光膜;采用真空镀膜技术在Ge板两面分别制备长波通和短波通滤光膜以实现带通,其中Ge和ZnS薄膜分别以电子束和电阻热蒸发的方式沉积,膜厚采用晶控仪控制,通过Matlab软件建立膜厚沉积数学模型,模拟并修正多层膜的Tooling以减少厚度误差。测试结果表明:10 μm~11 μm波段平均透射率达到94.3%,透射区波纹幅度为1.6 %; 4 μm~9.5 μm和11.5 μm~16 μm波段平均透射率小于0.1 %,各项耐环境测试表明滤波器满足使用要求。

     

    Abstract: The multispectral spectral imager equipped with a long-wave infrared detector can provide spatially high-resolution surface temperature information, and the study of surface temperature is of great significance in the global energy balance and climate change. A 10 μm~11 μm filter was used as the window of the infrared detector for surface temperature detection, and a wide-cutoff and high-transmission long-wave infrared bandpass filter film was designed on a Ge substrate using Ge and ZnS as the high and low refractive index materials, respectively. Vacuum coating technology was used to prepare long-wavelength pass and short-wavelength pass filter films on both sides of the Ge plate to realize the bandpass, in which Ge and ZnS films were deposited by electron beam and resistive thermal evaporation, respectively, and the film thickness was controlled by a crystal controller. The mathematical model of film thickness deposition was established by Matlab software, which simulated and corrected the tooling of the multilayered film in order to reduce the thickness error. The test results show that the average transmittance of 10 μm~11 μm reaches 94.3%, and the ripple amplitude of the transmittance area is 1.6%, of which the average transmittance of 4 μm~9.5 μm and 11.5 μm~16 μm is less than 0.1%, and the filter meets the requirements of the use through various environmental tests.

     

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