基于衍射元件的宽光谱紫外中继光学系统研究

司昌田; 杨磊; 郭程祥; 史天翼; 谢洪波

doi:10.5768/JAO202344.0301002

基于衍射元件的宽光谱紫外中继光学系统研究

doi: 10.5768/JAO202344.0301002

天津大学精密仪器与光电子工程学院，光电信息技术教育部重点实验室，天津 300072

基金项目: 国防预研基金

详细信息

作者简介:
司昌田（1998—），男，硕士研究生，主要从事光学设计研究。E-mail：sct@tju.edu.cn

通讯作者:
杨磊（1982—），男，博士研究生，副教授，主要从事光学设计、光电检测与成像研究。E-mail：yanglei@tju.edu.cn

中图分类号: TN23
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出版历程
- 收稿日期: 2022-05-19
- 修回日期: 2022-07-20
- 网络出版日期: 2023-03-04
- 刊出日期: 2023-05-15

Ultraviolet relay optical system with wide spectrum based on diffractive elements

Key Laboratory of Optoelectronics Information Technology (Ministry of Education), School of Precision Instruments and Optoelectronics Engineering, Tianjin University, Tianjin 300072, China

摘要

摘要: 紫外像增强器在电晕检测、战略国防、科学研究等领域具有广泛的应用，但由于与其配合使用的紫外光学镜头可用材料匮乏，存在色差校正困难等问题，难以满足宽光谱应用需求。论文分析了单层衍射元件和双层衍射元件在宽波段紫外光学系统中的适用性，并各设计了一套宽光谱、高分辨率的紫外光学系统。单层衍射紫外光学系统的工作波长范围为230 nm~280 nm，在截止频率60 lp·mm⁻¹处调制传递函数（MTF）值优于0.47；双层衍射紫外光学系统的工作波长范围为200 nm~400 nm，在截止频率60 lp·mm⁻¹处MTF值优于0.49。设计结果表明：衍射元件能够有效校正紫外光谱色差，与现有宽光谱紫外系统相比，该文设计的光学系统为中继成像系统，并且具有更宽的紫外光谱范围与更高的成像分辨率。
- 光学设计 /
- 衍射光学元件 /
- 紫外宽光谱 /
- 衍射效率
Abstract: Ultraviolet (UV) image intensifiers are widely used in corona detection, strategic national defense, scientific research and other fields. However, due to the lack of available materials for the UV optical lens and the difficulty of chromatic aberration correction, it is difficult to meet the needs of wide spectrum applications. The applicability of single-layer diffractive optical element (DOE) and double-layer diffractive optical element in broadband UV optical system was analyzed. A set of UV optical system with the wide spectrum and the high resolution were designed respectively. The working wavelength range of the single-layer diffractive UV optical system is 230 nm~280 nm, and the modulation transfer function (MTF) value at the cut-off frequency of 60 lp·mm⁻¹ is better than 0.47. The working wavelength range of the double-layer diffractive UV optical system is 200 nm~400 nm, and the MTF value at the cut-off frequency of 60 lp·mm⁻¹ is better than 0.49. The design results show that the DOE can effectively correct the chromatic aberration of the UV spectrum. Compared with the existing wide spectrum UV system, the designed optical systems are relay imaging systems with wider UV spectral range and higher imaging resolution.
- optical design /
- diffractive optical element /
- wide ultraviolet spectrum /
- diffractive efficiency

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图 1 五种衍射级次的衍射效率对比曲线

Fig. 1 Comparison curves of diffractive efficiency of five diffraction orders

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图 2 单层衍射元件的衍射效率曲线

Fig. 2 Diffractive efficiency curve of SLDOE

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图 3 单层衍射紫外光学系统结构图

Fig. 3 Structure diagram of UV optical system with SLDOE

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图 4 单层衍射紫外光学系统MTF曲线图

Fig. 4 MTF curves of UV optical system with SLDOE

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图 5 单层衍射紫外光学系统点列图

Fig. 5 Spot diagram of UV optical system with SLDOE

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图 6 单层衍射元件相位和线频参数曲线图

Fig. 6 Parametric curves of phase and line frequency of SLDOE

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图 7 最佳组合算法流程图

Fig. 7 Flow chart of optimal combination algorithm

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图 8 两种组合双层衍射元件的衍射效率曲线

Fig. 8 Diffractive efficiency curves of two combinations double-layer DOE

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图 9 双层衍射紫外光学系统结构图

Fig. 9 Structure diagram of UV optical system with double-layer DOE

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图 10 双层衍射紫外光学系统MTF曲线图

Fig. 10 MTF curves of UV optical system with double-layer DOE

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图 11 双层衍射紫外光学系统点列图

Fig. 11 Spot diagram of UV optical system with double-layer DOE

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图 12 双层衍射元件的相位和线频参数曲线图

Fig. 12 Parametric curves of phase and line frequency of double-layer DOE

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表 1 单层衍射紫外光学系统设计参数

Table 1 Design parameters of UV optical system with SLDOE

参数	数值
工作波段/nm	230～280
DOE设计波长/nm	250
成像比例	2:1
视场（像高）/mm	20
F数	3
MTF@60 lp·mm⁻¹	>0.4
后工作距/mm	>45
石英保护玻璃厚度/mm	5.5
系统总长/mm	<200

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表 2 双层衍射紫外光学系统设计参数

Table 2 Design parameters of UV optical system with double-layer DOE

参数	数值
工作波段/nm	200～400
DOE设计波长/nm	215
成像比例	2:1
视场（像高）/mm	20
F数	3.5
MTF@60 lp·mm⁻¹	>0.4
后工作距/mm	>45
石英保护玻璃厚度/mm	5.5
系统总长/mm	<260

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表 3 不同组合计算结果

Table 3 Calculation results of different combinations

组合方式	设计波长/nm	衍射级次m₁	全波段衍射效率≥95%	PIDE
CaF₂(+)-SILICA(-)	215	21	是	98.9%
SILICA(+)-CaF₂ (-)	—	—	否	—
CaF₂(+)-MgF₂(-)	—	—	否	—
MgF₂(+)-CaF₂ (-)	330	36	是	98.4%
MgF₂(+)-SILICA(-)	—	—	否	—
SILICA(+)-MgF₂(-)	—	—	否	—

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