衍射光学元件精密模压模具设计及预补偿

Mold design and pre-compensation of precision molding for diffractive optical elements

  • 摘要: 衍射光学元件较球面、非球面光学元件在校正色差方面具备较大优势,尤其是在红外光学领域,应用衍射光学元件可进一步增加光学系统的设计自由度。随着红外光学市场的进一步增大,常规的衍射光学金刚石车削技术难以满足大规模需求,精密模压技术成为解决上述问题的关键技术。模具设计是实现精密模压的重点,为了缩减模具设计周期,该文采用有限元仿真方法对模具进行预先设计及补偿,并试加工。采用单站式精密模压机对设计的模具进行了精密模压试验。模压试验结果表明:采用合理的工艺参数,能够实现衍射光学元件面形精度PV达到0.56 μm,位置误差<0.011 mm,环带高度误差<0.12 μm,验证了仿真预先补偿在衍射光学模具设计中的有效性。

     

    Abstract: The diffractive optical elements (DOE) have great advantages in correcting chromatic aberration compared with spherical and aspheric optical selements, especially in the field of infrared optics, the application of DOE can further increase the design freedom of optical systems. With the further expansion of infrared optics market, the conventional single point diamond turning technology of diffraction optics is difficult to meet the large-scale demands, so the precision molding technology has become the key technology to solve the above problems. The mold design is one of the key points of precision molding. In order to reduce the mold design cycle, the pre-design and pre-correction of mold were carried out by using the finite element simulation method, and then the mold was processed. The single-station precision molding machine was adapted for precision molding test of designed molds. The test results show that, with the reasonable process parameters, the PV value of the surface shape accuracy of DOE can reach 0.56 μm, the position error is less than 0.011 mm, and the height error of the band is less than 0.12 μm, which verifies the effectiveness of the simulation pre-compensation in the design of diffractive optical molds.

     

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