Mold design and pre-compensation of precision molding for diffractive optical elements
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摘要:
衍射光学元件较球面、非球面光学元件在校正色差方面具备较大优势，尤其是在红外光学领域，应用衍射光学元件可进一步增加光学系统的设计自由度。随着红外光学市场的进一步增大，常规的衍射光学金刚石车削技术难以满足大规模需求，精密模压技术成为解决上述问题的关键技术。模具设计是实现精密模压的重点，为了缩减模具设计周期，该文采用有限元仿真方法对模具进行预先设计及补偿，并试加工。采用单站式精密模压机对设计的模具进行了精密模压试验。模压试验结果表明：采用合理的工艺参数，能够实现衍射光学元件面形精度PV达到0.56 μm，位置误差<0.011 mm，环带高度误差<0.12 μm，验证了仿真预先补偿在衍射光学模具设计中的有效性。
Abstract:The diffractive optical elements (DOE) have great advantages in correcting chromatic aberration compared with spherical and aspheric optical selements, especially in the field of infrared optics, the application of DOE can further increase the design freedom of optical systems. With the further expansion of infrared optics market, the conventional single point diamond turning technology of diffraction optics is difficult to meet the large-scale demands, so the precision molding technology has become the key technology to solve the above problems. The mold design is one of the key points of precision molding. In order to reduce the mold design cycle, the pre-design and pre-correction of mold were carried out by using the finite element simulation method, and then the mold was processed. The single-station precision molding machine was adapted for precision molding test of designed molds. The test results show that, with the reasonable process parameters, the PV value of the surface shape accuracy of DOE can reach 0.56 μm, the position error is less than 0.011 mm, and the height error of the band is less than 0.12 μm, which verifies the effectiveness of the simulation pre-compensation in the design of diffractive optical molds.
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Keywords:
- diffractive optical elements /
- precision molding /
- mold design /
- chalcogenide glass
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图 6 模压后的衍射样件及其衍射环带填充情况
Figure 6. Molded diffractive sample and filling state of its diffractive band
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图 7 模压后零件面形以及与理论面形的对比
Figure 7. Comparison of molded surface shape of elements and theoretical surface shape
表 1 模压工艺参数及其相应的含义
Table 1 Molding process parameters and meanings
序号 参数 含义 1 T1 模压温度 2 T2 模压结束温度 3 T3 缓冷结束温度 4 T4 保压结束时温度 5 T5 最终冷却温度 6 ST1 均温时间 7 Vcooling 缓冷速率 8 P1 模压压力 9 P2 保压压力1 10 P3 保压压力2 11 PT1 P1阶段持续时间 12 PT2 P2阶段持续时间 13 PT3 P3阶段持续时间 
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表 2 衍射面设计参数
Table 2 Design parameters of diffractive profile
参数 值 参数 值 CC 0 n1 2.7781 k 0 n2 1 A −2.300081e-5 λ0 0.01 B 2.428109e-7 C1 −7.64024e-4 C 4.104299e-10 C2 6.36616e-7 D −2.101422e-12 HOR 1
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表 3 仿真补偿后衍射面参数
Table 3 Parameters of diffractive profile after simulation and compensation
参数 值 参数 值 CC 1.53e-10 n1 2.7781 k 1.97e-18 n2 1 A 4.4335e-4 λ0 0.01 B −1.3974e-5 C1 −7.64024e-4 C 1.5318e-7 C2 6.36616e-7 D −5.6902e-10
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表 4 优选的衍射零件模压过程参数值
Table 4 Parameter values of molding process for optimized diffractive optical elements
参数 值 参数 值 T1/℃ 235 P1/kN 0.2 T2/℃ 235 P2/kN 0.1 T3/℃ 180 P3/kN 0.1 T4/℃ 100 PT1/s 80 T5/℃ 50 PT2/s 100 ST1/s 1 000 PT3/s 80 Vcooling/℃/s 0.1
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