Abstract: Due to the existence of image motion, the imaging resolution of aerial photoelectric imaging system decreases, which seriously affects the overall performance of aerial photoelectric system. The image motion compensation technology can be used to improve the imaging quality of aerial photoelectric system. The principles of image motion compensation technology for mobile detectors and moving optical elements were analyzed, with emphasis on the high-precision image motion compensation technology based on fast steering mirror (FSM). Through the simplified engineering analysis, the law of follow-up angle of image motion compensation of FSM in parallel optical path and converging optical path was deduced, respectively. In addition, the defocus distance caused by the FSM in the converging optical path were analyzed, and the influence of defocus distance on the wave aberration of the optical system was discussed. The simulation results show that the wave aberration increases linearly with the increase of defocus distance. By analyzing the influence of wave aberration of optical system on its optical modulation transfer function (MTF), the results show that the F number is equal to 8, and at the Nyquist frequency, when the defocus distance is less than 0.1 mm, the declining quantity of optical MTF is within 26.6%.