Abstract: In order to solve the problems of low filling rate and easy deformation of imprinting patterns in the process of nanoimprint, a new vibration-assisted nanoimprint method was proposed. In the process of imprinting, the transverse vibration was applied to the imprinting adhesive, which increased the imprinting force and improved the filling rate. Using finite difference time domain (FDTD) method, different grating structures were numerically simulated in the wavelength range of 300 nm~1000 nm, and the influence rule of grating structure parameters on its absorptivity was obtained. Finally, the vibration-assisted nanoimprint experiment was carried out on the vibration-assisted device. The experimental results show that compared with the traditional nanoimprint technology, the filling rate of imprinting adhesive is increased by 30%, the surface morphology of microstructure after imprinting is improved and the defects are reduced.