紫外宽光谱大相对孔径光学系统设计

Design of UV optical system with wide ultraviolet spectrum and large relative aperture

  • 摘要: 现有大部分紫外光学镜头的工作带宽较窄,紫外镜头的材料相对较少,镜头的紫外色差校正困难,导致其应用适应性降低。采用负正透镜交叠分布与类双高斯对称式结构形式,并利用熔石英材料和氟化钙材料本身的宽光谱透过性,设计了一种兼具大相对孔径、宽视场和高分辨率的紫外宽光谱光学系统。该系统的工作波长范围为240 nm~360 nm,紫外工作带宽高达120 nm,所有透镜均采用球面透镜,便于加工和检测。在全视场范围内,以中心波长300 nm为参考波长,系统横向色差最大值不超过1个像素,在截止频率50 lp·mm−1处的调制传递函数值优于0.4,并且各个视场的像点弥散斑半径均方根值均优于10 μm。设计结果表明:该紫外宽光谱光学系统的成像性能优良,分辨率高,色差小,满足设计要求。

     

    Abstract: Most of the current ultraviolet (UV) optical lenses have narrow working band, which results in the decrease of their application adaptability. It is becasue of the fewer lens materials for UV lens design, and further it is difficult for the correction of UV color aberration. By applying the optical structure of negative-positive lenses overlapping distribution together with quasi-double Gaussian symmetry, as well as utilizing the wide spectral transmittance of fused quartz material and calcium fluoride material, an optical system with wide ultraviolet spectrum was designed, which also had the advantages of large relative aperture, wide field of view and high resolution. Its working wavelength was from 240 nm to 360 nm and the UV working bandwidth reached to 120 nm. All of the lenses in the designed UV optical system were spherical lenses, which could be fabricated and measured easily. Taking the central wavelength of 300 nm as the reference wavelength, the maximum lateral color aberration of the designed UV optical system was less than one pixel size over the full field of view. In the cut-off frequency of 50 lp·mm−1, the modulation transfer function (MTF) value was better than 0.4. The root mean square (RMS) value of image spot diagram in each field was better than 10 μm. The design results show that the designed UV optical system with wide UV spectrum has good imaging quality, high resolution and small color aberration, which satisfies the design requirements.

     

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