Abstract: Aiming at the typical optical phased array, a set of silicon-based optical phased array chip performance evaluation methods were established to provide reliable data support for the optimal design of optical phased arrays. By designing a Fourier imaging system, the optical phased array could be dynamically imaged, and simultaneous observation of near-field and far-field imaging could be achieved. On this basis, a calibration scheme was designed to optimize the initial phase of the phased array. At the same time, the characteristic parameters such as scanning speed, angle and accuracy were analyzed from theoretical derivation and simulation to the structural design of the test system.