Research on measurement method of laser beam quality with orthogonal slit scanning
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摘要: 传统激光光束质量测量方法在CCD相机靶面前激光光路上加装可调衰减模块，对激光光束进行衰减。但该方法受限于CCD相机像元尺寸限制，难以进行高精度测量。为此该文提出了一种滚轮狭缝式激光光束质量评价方法，在测量时采用狭缝滚轮上的扫描狭缝直接扫描被测激光光束，使用InGaAs探测器配合聚焦透镜进行测量。经过与电机同轴的高精度增量式编码器确保采集位置与采集数据同步，扫描频率根据被测激光脉冲频率和光斑的直径范围可进行调整，该方法对光斑空间采样分辨率优于1 μm。实验结果表明，采用该方法测得的激光M2因子数值与被测激光器提供数值一致，测量不确定度小于10%。Abstract: In the traditional laser beam quality measurement method, an adjustable attenuation module is installed on the laser beam path in front of the change coupled device (CCD) camera target to attenuate the laser beam. However, the high-accuracy measurement is difficult to carry out due to the limitation of CCD camera pixel size by this method. On this basis, an evaluation method of laser beam quality with roller slit was proposed. In the measurement, the scanning slit on the slit roller was used to directly scan the measured laser beam, and the InGaAs detector was used to cooperate with the focusing lens for measurement. The high-accuracy incremental encoder was coaxial with the motor, which ensured the synchronous acquisition of position and data. According to the measured laser pulse frequency and the diameter range of the spot, the scanning frequency could be adjusted, and the resolution of spot spatial sampling was better than 1μm. The experimental results show that the value of laser M2 factor measured by this method is consistent with that provided by the measured laser, and the measurement uncertainty is less than 10%.
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Keywords:
- laser beam quality /
- slit /
- rotating roller /
- scanning frequency
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图 2 扫描狭缝法测量激光光束原理图
Figure 2. Schematic of laser beam measurement by scanning slit method
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图 4 旋转滚轮式正交狭缝扫描测量探头结构图
Figure 4. Structure diagram of orthogonal slit scanning measurement probe with rotary roller type
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图 5 激光椭圆光斑扫描测量过程示意图
Figure 5. Schematic of measurement process for laser ellipse spot scanning
表 1 不确定度来源和评定结果
Table 1 Sources of uncertainty and evaluation results
不确定度分量 相对不确定度/% 评定方法 光电探测器引入的测量不确定度 1.7 B类 扫描狭缝引入的不确定度 1.7 B类 聚焦透镜等光学系统引入的不确定度 0.8 B类 光束对准引入的不确定度 1.1 B类 编码器定位引入的不确定度 1.0 B类 探测器纵向定位引入的不确定度 0.7 B类 激光波长引入的测量不确定度 0.5 B类 数据拟合处理 2.0 B类 测量重复性引入的不确定度 1.0 A类 合成标准不确定度 4.6 扩展不确定度（k=2） 9.2 
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