锁相热像方法实验测量Nb2O5薄膜吸收率

Absorptance measurement on Nb2O5 coating with lock-in thermography method

  • 摘要: 利用锁相热像方法定量测量了光学镀膜的吸收率。待测薄膜吸收周期调制的激光能量,在表面形成热波,将红外相机记录的热分布信号进行锁相相关处理,获得信噪比提高的热图像。采用标准吸收样品对系统进行定标,可获得光热信号幅度与样品吸收率之间的定量联系,进而在相同实验条件下测量待测样品,可通过光热信号直接计算获得其绝对吸收率。在1 060 nm波长处开展了实验研究,测量获得了不同厚度Nb2O5镀膜的吸收率数值,实测的吸收可达80 ppm。

     

    Abstract: The absorptance of the optical coating was quantitatively measured by the lock-in thermography method. The periodically modulated laser intensity was absorbed by the coatings to be tested, and a thermal wave was formed on the coatings surface. The thermal distribution signal recorded by the infrared camera was processed by the lock-in method to obtain the thermal image with improved SNR. The standard absorption samples were used to calibrate the system to obtain the quantitative relations between the photothermal signal amplitude and the samples absorptance, then the samples to be tested were measured under the same experimental conditions, and the absolute absorptance could be obtained by the direct calculation of the photothermal signal. The experimental study is carried out at the wavelength of 1 060 nm, the absorptance of the Nb2O5 coating with different thickness was measured, and the measured absorptance can reach to 80 ppm.

     

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