Abstract:
The dynamic tuning integrated optical devices possess a good application prospect in the fields of imaging and display. A noval dynamic tuning titanium oxide polymer micro-nano structure filter based on stretchable substrate was proposed. The surface of the structure could be fabricated by the electron beam evaporation deposition and lift-off technology.The finite-difference time-domain(FDTD) method was used to simulate and optimize the structure parameters, and the filtering effect and its physical laws were analyzed. The analysis results indicate that, by stretching the substrate, the designed filter structure can achieve full waveband filtering at the visible light waveband, and it also has ultra-high reflectivity, most of which is above 95%, and the maximum reaches 99.1%. This provides theoretical support for the experiment of fabricating dynamic tuning filter array by deposition and lift-off technology. Compared with the disadvantage that the device structure of static tuning filter cannot be changed once it is finalized, the dynamic tuning structure can still be adjusted in real time after the device is finalized.