Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR
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摘要: 为了满足可见-近红外波段的高光谱分辨率和高灵敏观测需求, 采用大面阵、低噪声碲镉汞焦平面制备技术和低损伤衬底去除技术, 成功制备了高信噪比大面阵可见/近红外碲镉汞焦平面探测器。无损衬底去除技术采用机械抛光和化学腐蚀相结合的方法, 使焦平面的响应波段拓展至400 nm~2 600 nm。采用信号定量化焦平面测试评价手段对可见/近红外碲镉汞焦平面的性能进行评估, 640×512 25 μm中心距碲镉汞焦平面的波段量子效率可达到88.4%, 信噪比达到287, 有效像元率大于98%, 能够获得清晰的可见和近红外波段图像。Abstract: To meet the requirement of high-resolution and high-sensitivity observation in visible-near infrared, the HgCdTe focal plane arrays(FPAs) with high signal-to-noise ratio was fabricated based on the large-array low-noise HgCdTe detector manufacture technology and low-damage substrate removal technology. The response of short-wave infrared detector was extended to 400 nm~2 600 nm by the ZnCdTe substrate removed with mechanical thinning and chemical wet etching technology. After the fabrication of the Vis/NIR 640×512 pixel 25 m FPAs, the performance was evaluated with a certain quantity of radiation. The results indicate that the quantum efficiency is approximately 88.4% at 2.32 μm waveband, the effective pixel rate is 98% and the signal-to-noise ratio is 287, the clear imaging quality in Vis/NIR waveband can be obtained.
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图 1 CdZnTe/HgCdTe液相外延材料实物图
Figure 1. Photograph of CdZnTe/HgCdTe materials grown by LPE
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图 2 CdZnTe / HgCdTe探测器结构剖面图
Figure 2. Cross-section schematic of CdZnTe/HgCdTe detector
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图 3 640×512 CdZnTe/HgCdTe焦平面探测器模块图
Figure 3. Photograph of 640×512 CdZnTe/HgCdTe FPAs detector module
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图 4 衬底去除前、后探测器的响应光谱图
Figure 4. Relative response spectra of detector before and after substrate removal
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图 5 640×512 Vis/NIR HgCdTe焦平面响应
Figure 5. Response histogram of 640×512 Vis/NIR HgCdTe FPAs
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图 6 640×512 Vis/NIR HgCdTe焦平面噪声
Figure 6. RMS noise histogram of 640×512 Vis/NIR HgCdTe FPAs
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图 7 640×512 Vis/NIR HgCdTe焦平面的归一化响应光谱图(0.4 μm~3.0 μm)
Figure 7. Normalized spectral response of 640 512 Vis/NIR HgCdTe FPAs(0.4 μm~3.0 μm)
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图 8 100 K时窄带通滤光片的归一化透射光谱
Figure 8. Normalized spectral response of narrow band pass filter at 100 K
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图 9 计算得到器件的量子效率与响应率的对应关系
Figure 9. Relationship between calculated quantum efficiency and FPAs' responsivity
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图 10 640×512 Vis/NIR HgCdTe焦平面的量子效率谱
Figure 10. Quantum efficiency spectrum of 640×512 Vis/NIR HgCdTe FPAs
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图 11 可见/近红外大面阵碲镉汞焦平面拍摄的可见、短波红外图像
Figure 11. Visual (left) and NIR (right) images acquired by 640 512, 25 m HgCdTe FPAs
表 1 640×512 Vis/NIR HgCdTe焦平面性能
Table 1 Characteristics of 640×512 Vis/NIR HgCdTe FPAs
测试结果 平均响应率/(V·W-1) 5.13E+07 响应/(mV·K-1) 56.8 噪声/ (mV) 2.68 响应率非均匀性/(%) 9.8 有效像元率/ (%) 98.8 
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