可见/近红外超光谱碲镉汞焦平面研究
Research on HgCdTe focal plane arrays for ultra-spectrumdetection in Vis/NIR
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摘要: 为了满足可见-近红外波段的高光谱分辨率和高灵敏观测需求, 采用大面阵、低噪声碲镉汞焦平面制备技术和低损伤衬底去除技术, 成功制备了高信噪比大面阵可见/近红外碲镉汞焦平面探测器。无损衬底去除技术采用机械抛光和化学腐蚀相结合的方法, 使焦平面的响应波段拓展至400 nm~2 600 nm。采用信号定量化焦平面测试评价手段对可见/近红外碲镉汞焦平面的性能进行评估, 640×512 25 μm中心距碲镉汞焦平面的波段量子效率可达到88.4%, 信噪比达到287, 有效像元率大于98%, 能够获得清晰的可见和近红外波段图像。Abstract: To meet the requirement of high-resolution and high-sensitivity observation in visible-near infrared, the HgCdTe focal plane arrays(FPAs) with high signal-to-noise ratio was fabricated based on the large-array low-noise HgCdTe detector manufacture technology and low-damage substrate removal technology. The response of short-wave infrared detector was extended to 400 nm~2 600 nm by the ZnCdTe substrate removed with mechanical thinning and chemical wet etching technology. After the fabrication of the Vis/NIR 640×512 pixel 25 m FPAs, the performance was evaluated with a certain quantity of radiation. The results indicate that the quantum efficiency is approximately 88.4% at 2.32 μm waveband, the effective pixel rate is 98% and the signal-to-noise ratio is 287, the clear imaging quality in Vis/NIR waveband can be obtained.
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