Abstract: In order to facilitate the adjustment of optical path difference, the conventional Mach-Zehnder (M-Z) interference system was improved by using the total reflection prism, and the theoretical model of M-Z measurement system based on the principle of dual-wavelength interference was established. A complete optical system model was built using Zemax, and the entire system was simulated and tested.The results of image quality evaluation show that the energy concentration of the system within the range of 532 nm~632.8 nm is 85%, the distortion value is less than 0.02% and the modulation transfer function is above 0.9 at the cut-off frequency of 10 lp/mm, which meets the system imaging requirements for the tests of transmissive sample. It provides a theoretical basis and technical support for the practical application of high performance interference systems.