Abstract: The advantages and disadvantages of existing beam scanning system were compared and analyzed.A 2D galvanometer scanning system was used as the optical axis alignment device of the multispectral integrated target.The alignment precision of the optical axis alignment device can affect the calibration accuracy of the multispectral integrated target. The directional error of 2D galvanometer scanning system was analyzed, the directional model of 2D galvanometer scanning system was established, and the measurement experiment of alignment error of 2D galvanometer scanning system was carried out. The results show that the azimuth error and pitch angle error of the 2D galvanometer scanning system are less than 8″, the alignment angle error is less than 9″, and the alignment error is less than 10″, which demonstrates that the optical axis alignment accuracy of multispectral integrated target can be satisfied.