Probe design of nanometer measuring machine based on grating strain sensor
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摘要: 为了提高纳米坐标测量机探针的测量精度，且能满足对复杂曲面或微结构进行精确测量的要求，提出了一种新颖的基于微探针系统的光纤布拉格光栅(FBG)探针。该探针具有较高灵敏度和可重复性。提出该新型FBG探针，即探针里有一个熔融的球形顶端，FBG作为应变传感器内置在测杆上。介绍了光纤探针的基本原理，并利用有限元软件ANSYS 11对探针的应变分布在轴向和横向载荷两种典型配置分别进行了仿真分析，结果表明仿真分析和理论计算相吻合。通过实验对光纤探针的灵敏度和分辨率分别进行测试。实验结果表明，在轴向载荷条件下，用位移分辨率为1.5 nm的压电换能器对探针进行性能测试，得到光纤探针的测量分辨率为60 nm。即光纤探针具有较高的灵敏度和分辨率，其性能满足实际测量需要。Abstract: In order to improve measuring accuracy of nano coordinate measuring machine probe and meet requirements of accurate measurement for complex surfaces or micro structures, a novel optical fiber Bragg grating (FBG) based micro contact probe system is proposed in this paper. The probe has high sensitivity and repeatability. This new FBG probe has a molten spherical top, and as a strain sensor, FBG is built on the spindle. Basic principle of fiber-optic probe is introduced. The finite element software ANSYS 11 is used to simulate strain distribution of probe in axial and lateral loads. Results show that simulation analysis agrees well with theoretical calculation. Sensitivity and resolution of fiber probe are tested by experiment. Experimental results show that performance of probe is measured by piezoelectric transducer with displacement resolution of 1.5 nm under axial load condition, and measurement resolution of fiber probe is 60 nm. Fiber probe has a high sensitivity and resolution, and its performance can meet requirements of actual measurement.
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Keywords:
- fiber Bragg grating /
- optical fiber /
- ANSYS 11 /
- CMM /
- strain distributions /
- resolution
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图 3 光纤棒在X轴方向的力F下的示意图
Figure 3. Schematic diagram of fiber bar bending due to force F in x-direction
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图 4 z方向外力作用下的横向载荷下沿探针的应变分布透视图
Figure 4. Perspective view of strain distribution along probe under lateral loading with force in z-direction
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图 7 一个简单的探针测试系统在轴向载荷下的配置原理图
Figure 7. Configuration diagram of simple probe test system under axial load
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图 10 熔融球形探针在PZT驱动电压步长为0.1V(150nm)下的应变灵敏度的曲线拟合
Figure 10. Curve fitting of strain sensitivity of fused spherical probe at PZT driving voltage step size of 0.1 V(150nm)
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图 11 球形探针在横向载荷条件下的测试原理图
Figure 11. Test principle of spherical probe under transverse load conditions
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[1] Cheng CH, Chang MC, Liu WF. Electrical power sensor based on fiber Bragg grating and pizeo-electric transducer[J]. Optics and Precision Engineering, 2011, 19 (9):2255-2262. doi: 10.3788/OPE.20111909.2255
[2] 熊燕玲, 任乃奎, 梁欢, 等.分布式反馈激光器动态扫描光纤布拉格光栅波长解调系统[J].强激光与粒子束, 2015, 27(01): 37-40. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs201501008 Xiong Yanling, Ren Naikui, Liang Huan, et al. Distributed feedback laser dynamic scanning fiber Prague grating wavelength demodulation system[J]. High Power Laser and Particle Beams, 2015, 27(01): 37-40. http://d.old.wanfangdata.com.cn/Periodical/qjgylzs201501008
[3] Brand U, Kirchhoff J. A micro-CMM with metrology frame for low uncertainty measurements[J]. Meas. Sci. Technol, 2005 (16): 97-2489. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=3fb22cb36d2d2462362445b91e2679c6
[4] 程方, 范光照, 费业泰.纳米三坐标测量机接触式测头预行程测量(英文)[J].纳米技术与精密工程, 2010, 8(02):107-113. http://www.cqvip.com/Main/Detail.aspx?id=33367816 Cheng Fang, Fan Guangzhao, Fei Yetai. Measurement of pre-travel distance of a touch probe for nano-CMM[J]. Nanotechnology and Precision Engineering, 2010, 8(02):107-113. http://www.cqvip.com/Main/Detail.aspx?id=33367816
[5] 周耀新, 王宏涛, 王建梅.坐标测量机如何选用合适的测头探针[J].合肥工业大学学报:自然科学版, 2004, (10):1369-1371. http://d.old.wanfangdata.com.cn/Periodical/hfgydxxb200410066 Zhou Yaoxin, Wang Hongtao, Wang Jianmei. Probe selection of the coordinate measuring machine(CMM)[J]. Journal of Hefei University of Technology(Natural Science), 2004, (10):1369-1371. http://d.old.wanfangdata.com.cn/Periodical/hfgydxxb200410066
[6] Enami K, Kuo C C, Nogami T, et al. Development of nano-probe system using optical sensing[C]. Austria: IMEKO-XV World Congress, 1999, 189-192.
[7] Furutani R, Young Won C. High resolution probe system for CMM[d]. Italy: Proc. 2nd euspen Int. Conf., Torino, 2001: 246-249.
[8] 费业泰, 金施群, 胡毅, 等.坐标测量机激光非接触式测头的研制[J].现代计量测试, 1995(4):8-10. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199400503067 Fei Yetai, Jin Shiqun, Hu Yi, et al. Study on the non-touch laser probe for CMM[J]. Modern Measurement And Test, 1995(4):8-10. http://www.wanfangdata.com.cn/details/detail.do?_type=perio&id=QK199400503067
[9] 卢明臻, 高思田, 杜华, 等.计量型原子力测头用于纳米台阶高度样板的测量[J].计量学报, 2008, 29(3):193-197. http://d.old.wanfangdata.com.cn/Periodical/jlxb98200803001 Lu Mingzhen, Gao Sitian, Du Hua, et al. Measurement of nano-step height scales with a metrological AFM head[J]. Acta Metrologica Sinica, 2008, 29(3):193-197. http://d.old.wanfangdata.com.cn/Periodical/jlxb98200803001
[10] 韩欣, 林家春.光纤触发式测头及其性能测试研究[J].机电工程, 2012, 29(07):799-802. http://d.old.wanfangdata.com.cn/Periodical/jdgc201207013 Han Xin, Lin Jiachun. An optical fiber trigger probe and its performance test[J]. Journal of Mechanical & Electrical Engineering, 2012, 29(07):799-802. http://d.old.wanfangdata.com.cn/Periodical/jdgc201207013
[11] 刘颖刚, 车伏龙, 傅海威, 等.光纤布拉格光栅折射率传感研究进展[J].光电技术应用, 2015, 30(1):1-7. http://d.old.wanfangdata.com.cn/Periodical/gdjsyy2015010002 Liu Yinggang, Che Fulong, Fu Haiwei, et al. Research progress of fiber bragg grating refractive index sensing[J]. Electro-optic Technology Application, 2015, 30(1):1-7. http://d.old.wanfangdata.com.cn/Periodical/gdjsyy2015010002
[12] 张燕君, 王光宇, 付兴虎.长周期光纤光栅-布拉格光纤光栅多波长调解[J].光电工程, 2016, 43(8): 13-17. http://www.opticsjournal.net/Mobile/M_Details?aid=OJ160912000072iOkRnU Zhang Yanjun, Wang Guangyu, Fu Xinghu. Multiple wavelength demodulation method of long period fiber grating and fiber bragg grating[J]. Opto-Electronic Engineering, 2016, 43(8): 13-17. http://www.opticsjournal.net/Mobile/M_Details?aid=OJ160912000072iOkRnU
[13] 胡志新, 王震武, 马云宾, 等.温度补偿式光纤光栅土压力传感器[J].应用光学, 2010, 31(01):110-113. http://d.old.wanfangdata.com.cn/Periodical/yygx201001025 Hu Zhixin, Wang Zhenwu, Ma Yunbin, et al. Soil pressure sensor based on temperature compensation FBG[J]. Journal of Applied Optics, 2010, 31(01):110-113. http://d.old.wanfangdata.com.cn/Periodical/yygx201001025
[14] 赵颖, 孙伟民, 宋大伟, 等.陶瓷封装对光纤光栅体温测量探头效果的影响[J].应用光学, 33(6):1173-1178. http://d.old.wanfangdata.com.cn/Periodical/yygx201206034 Zhao Ying, Sun Weimin, Song Dawei, et al. Effect of ceramic packages on fiber grating measuring temperature probe[J]. Journal of Applied Optics, 33(6):1173-1178. http://d.old.wanfangdata.com.cn/Periodical/yygx201206034
[15] 李志全, 李亚萍, 朱丹丹, 等.基于滤波法的光纤光栅传感解调方案[J].应用光学, 2006, 27(4): 327-331. http://d.old.wanfangdata.com.cn/Periodical/yygx200604017 Li Zhiquan, Li Yaping, Zhu Dandan, et al. Demodulation scheme for filtering method based fiber Bragg grating sensing[J]. Journal of Applied Optics, 2006, 27(4):327-331. http://d.old.wanfangdata.com.cn/Periodical/yygx200604017
[16] Ji H, Kong L X, Hsu H Y, et al. Concept design of a novel tactile probe tip for down scaled 3D CMMs Proc.SPIE (Brisbane, Australia)2005, 60370: 9-182.
[17] Oiwa T, Tanaka T. Miniaturized three-dimensional touch trigger probe using optical fiber bundle[J]. Meas. Sci. Technol, 2005, 16(8): 1574. doi: 10.1088/0957-0233/16/8/005
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