Visualization of nanometer head slider lubricant films based on ellipsometric microscope
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摘要: 针对磁头飞行导致液体润滑膜的转移研究以及润滑膜在磁头上的动态变化特性观测问题，基于改进的垂直物镜的椭圆偏振显微镜，提出起偏器相移方法的磁头表面润滑膜厚度计算模型，实现了润滑膜厚度的测量。实验以非极性润滑剂Z03覆盖的磁头为样品对椭圆偏振显微镜进行标定，以极性润滑剂Zdol4000作为样品，对其在磁头表面的去湿现象进行观察。该方法测量精度可达0.37 nm，分辨力约0.36 μm，可为其他纳米级薄膜观测提供一定的技术参考。Abstract: Aiming at the problems of shift of lubricant films on head slider, and dynamic change visualization of lubricant films on head slider, this paper presents caculation model of lubricant thickness distribution on a head slider surface using phase shift method, which is base on improved vertical-objective-based ellipsometric microscope (VEM). Measurement of lubricant film thickness is achived with this method. Taking nonpolar perfluoropolyether (PFPE) lubricant Z03 as a sample, ellipsometric microscope is calibrated; while taking polar PFPE lubricant Zdol4000 as a sample, dewetting on head slider surface is observed. Experimental results show measuring accuracy and resolution are 0.37 nm and 0.36 μm respectively. This can be reference for other visualization of nm lubricant films.
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图 1 椭偏参量相位差|Δ-Δd|与膜厚h近似线性关系
Figure 1. Linear relationship of phase shift |Δ-Δd| and thickness h.
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图 4 刀口目标成像法所得VEM的MTF曲线
Figure 4. MTF of VEM obtained from observation of the knife-edge image
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