Abstract: Based on principle of laser stimulated emission deplection, far field optical super-resolution imaging technique, modulated by vortex phase plate, incident Gaussian laser will be transformed into a donut-shaped light beam with zero central intensity. Functional nanoscale structures will be obtained when laser beam with donut-shaped laser beam irradiates onto photosensitive polymer.This paper presents laser direct lithographing system based on CW laser beam, as well as its applications in preparation of composite nanostructures. When light source is 532 nm CW laser output, a composite nanopillar with pillar's diameter less than 50 nm and pillar arrays is fabricated with a positive photo resist. While composite structure of nanochannel with < 100 nm inner diameter in center of micropillar, corresponding arrays are fabricated with a negative photo resist. In addition, when laser source is continuous 405 nm fiber laser, composite nanopillar with 153 nm diameter and various arrays are also achieved with positive photo resist. Basic units of these composite nanostructures are all broken through optical Abbe's diffraction limit. and have practical potential.