利用环形子孔径拼接法检测非球面反射镜

Annular sub-aperture stitching used for aspheric testing

摘要: 为解决高精度检测非球面反射镜的难题，提出利用Zygo干涉仪完成非球面环形子孔径检测。通过移动待测非球面，使得由干涉仪产生的参考球面波，以不同的曲率半径匹配待测非球面的各个环带区域，分别测试每个环带，进而完成对整个非球面的拼接检测。以双曲面反射镜为例进行拼接检测，并搭建辅助光路，利用无像差点法对拼接结果进行验证。验证结果表明：该方法测量误差小于1/20 （=632.8 nm）。

Abstract: In order to solve the problem of high-precision measurement of aspheric mirror,we put forward the method of aspheric annular sub-aperture stitching testing by using Zygo interferometer.By moving the stay of the testing aspheric surface,the reference spherical waves produced by the inteferometer could match the different band areas of the testing aspheric surface with different curvature radii, each annulus was tested,then the whole aspheric surface testing could be completed.A hyperboloid reflector was tested with annular sub-aperture stitching, and a light path was set up to verify the stitching result using aberrationfree point method . The results show that the error is less than 1/20 (=632.8 nm).