基于双频激光干涉仪的显微模板精密测量

薛媛, 陈青山, 刘力双, 吕勇

薛媛, 陈青山, 刘力双, 吕勇. 基于双频激光干涉仪的显微模板精密测量[J]. 应用光学, 2015, 36(2): 259-265. DOI: 10.5768/JAO201536.0203004
引用本文: 薛媛, 陈青山, 刘力双, 吕勇. 基于双频激光干涉仪的显微模板精密测量[J]. 应用光学, 2015, 36(2): 259-265. DOI: 10.5768/JAO201536.0203004
shu
Xue Yuan, Chen Qing-shan, Liu Li-shuang, Lyu Yong. Precision measurement of microscopic module through dual-frequency laser interferometer[J]. Journal of Applied Optics, 2015, 36(2): 259-265. DOI: 10.5768/JAO201536.0203004
Citation: Xue Yuan, Chen Qing-shan, Liu Li-shuang, Lyu Yong. Precision measurement of microscopic module through dual-frequency laser interferometer[J]. Journal of Applied Optics, 2015, 36(2): 259-265. DOI: 10.5768/JAO201536.0203004
shu

基于双频激光干涉仪的显微模板精密测量

  • 北京信息科技大学 仪器科学与光电工程学院,北京 100192

基金项目: 

北京市优秀人才培养资助（2013D005007000007）;北京市属高等学校青年拔尖人才培育计划项目（CIT&TCD201404124）

详细信息
    作者简介:

    薛媛（1991-），女，湖南益阳人，硕士，主要从事精密仪器及机械研究。Email:135137@163.com

    通讯作者:

    陈青山（1971-），男，副教授，主要从事精密测量技术与光电检测技术研究。Email: chenqqss@sina.com

  • 中图分类号: TN247

Precision measurement of microscopic module through dual-frequency laser interferometer

  • School of Instrumentation Science and Opto-Electric Engineering,Beijing Information Science &Technology University, Beijing 100192, China

摘要

    摘要
  • 摘要: 为了对光纤阵列测量的高精度显微模板进行精密检测，采用双频激光干涉仪结合显微视觉系统，通过骨架化、腐蚀法、质心法等算法对显微图像进行计算处理，实现模板特征刻线的提取与精确定位。对模板上8条刻度线之间的间距分别进行重复测量和组合测量，实验结果表明重复测量的标准偏差不大于0.07 m，组合测量的标准偏差不大于0.04 m。介绍了测量系统构成与工作原理，并对测量过程进行了精度分析，分析结果表明测量过程的极限误差不大于0.10 m。
    Abstract: In order to accurately measure the high-precision microscopic module of optic fiber array , a method combined a dual-frequency laser interferometer with a micro-vision system was adopted. The characterized scale was extracted and located precisely from the micro-vision image by way of skeletonization, erosion algorithm and the centroid method. The spaces between 8 scales were repetitively measured, with the maximum standard deviation being no more than 0.07 m. These 8 scales were further measured through the combination method, with the maximum standard deviation being no more than 0.04 m. The configuration and principle of the measurement system were described. Accuracy analysis indicates that the limit error of the method is less than 0.10 m.
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