基于相位恢复的光学元件面形检测技术研究

Testing optical surface with phase recovery

摘要: 利用标量衍射的角谱理论，研究了基于两幅光强分布的相位恢复算法，并将此算法应用到光波的波前及光学元件面形的检测中。实验研究了球面光波波前的相位恢复及面形检测，给出了恢复波前与理想波前之间的偏差，采用求Zernike系数的广义逆矩阵的方法，用程序实现了光学元件面形的Zernike拟合。

Abstract: Using the angular spectrum theory of scalar diffraction, the phase retrieval algorithm with two intensity patterns was carried out, and was used to test the optical surfaces and wavefronts. The wavefronts of the spherical wave surfaces were retrieved by the algorithm in experiment. The algorithm of wavefront fitting based on the Zernike polynomials was realized with computer programmer by calculating generalized inverse matrix of Zernike coefficients.