不同结构绝对光栅尺的误码机制研究

韦青海, 陈新, 刘强, 王晗, 陈彬, 房飞宇

韦青海, 陈新, 刘强, 王晗, 陈彬, 房飞宇. 不同结构绝对光栅尺的误码机制研究[J]. 应用光学, 2015, 36(1): 103-108. DOI: 10.5768/JAO201536.0105003
引用本文: 韦青海, 陈新, 刘强, 王晗, 陈彬, 房飞宇. 不同结构绝对光栅尺的误码机制研究[J]. 应用光学, 2015, 36(1): 103-108. DOI: 10.5768/JAO201536.0105003
shu
Wei Qing-hai, Chen Xin, Liu Qiang, Wang hang, Chen Bin, Fang Fei-yu. Machine-made bit error mechanism of absolute grating scale in different structures[J]. Journal of Applied Optics, 2015, 36(1): 103-108. DOI: 10.5768/JAO201536.0105003
Citation: Wei Qing-hai, Chen Xin, Liu Qiang, Wang hang, Chen Bin, Fang Fei-yu. Machine-made bit error mechanism of absolute grating scale in different structures[J]. Journal of Applied Optics, 2015, 36(1): 103-108. DOI: 10.5768/JAO201536.0105003
shu

不同结构绝对光栅尺的误码机制研究

  • 1.

    广东工业大学 机电学院 广州 510006;

  • 2.

    广东省微纳加工技术与装备重点实验室 广州 510006

基金项目: 

国家自然科学基金（51305084）;广东省创新团队资助项目（201001G0104781202）;国家自然科学基金广东省联合基金重点项目(U1134004); 广东省微纳加工技术与装备重点实验室开放基金项目（GDMNML2013O1）; 广东省重点实验室开放基金项目（2011A060901026）

详细信息
    作者简介:

    韦青海(1989-)，男，广西柳州人，硕士研究生，主要从事绝对光栅尺动态分析研究。Email:593159031@qq.com

    通讯作者:

    韦青海(1989-)，男，广西柳州人，硕士研究生，主要从事绝对光栅尺动态分析研究。Email:593159031@qq.com

  • 中图分类号: TN202

Machine-made bit error mechanism of absolute grating scale in different structures

  • 1.

    School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China;

  • 2.

    Guangdong Provinicial Key Laboratory of Micro-nano Manufacturing Technology and Equipment,Guangzhou 510006,China

摘要

    摘要
  • 摘要: 针对光栅尺具有断电位置复位、无累计误差、高精度优点，在光学隔振平台上分别建立开放式和封闭式绝对光栅尺实验系统，绝对光栅尺采用图像识别原理，以气浮直线电机ArotechABL1500为参考对象，使用激光干涉仪RENISHAW XL-80校核精度，研究不同结构绝对光栅尺的误码特点及原因。通过对比实验及研究分析，表明封闭式绝对尺相对于开放式绝对尺的误码率要高，开放式绝对式光栅尺的误码率为3%，封闭式绝对式光栅尺的误码率为8%。
    Abstract: Aiming at the advantages of grating scale has that it can set reset for power outage, has no cumulative error with high accuracy, we established the unsealed and sealed absolute grating experimental systems respectively by using the technology of image identification on the optical vibration isolation platform.Taking the air bearing linear motor ArotechABL1500 for reference,we checked its accuracy by the laser interferometer RENISHAW XL-80, and analyzed the characters and the causes of the bit errors of different-structure absolute grating scale. By the contrast experiment and the analysis, it is proved that the bit error rate of the sealed absolute ruler is higher than that of unsealed, the bit error rate of the sealed absolute ruler is 3% while the unsealed one is 8%.
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  • [1]Reboud V, Leveque G, Kehoe T, et al. Enhanced extraction efficiency in nanoimprinted light emitting structures mediated by plasmon-exciton interaction[C].USA: IEEE, 2011.
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    孙强. 高精度绝对式光栅尺研究进展及技术难点[J]. 世界制造技术与装备市场, 2012 (5): 72-73.
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出版历程
  • 收稿日期:  2014-08-12
  • 修回日期:  2014-10-06
  • 刊出日期:  2015-01-14

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