湿热环境对Ge基中波减反射膜可靠性的影响

陈凤金, 苏现军, 马胜昔, 孙永燕, 阎凯

陈凤金, 苏现军, 马胜昔, 孙永燕, 阎凯. 湿热环境对Ge基中波减反射膜可靠性的影响[J]. 应用光学, 2015, 36(1): 93-97. DOI: 10.5768/JAO201536.0105001
引用本文: 陈凤金, 苏现军, 马胜昔, 孙永燕, 阎凯. 湿热环境对Ge基中波减反射膜可靠性的影响[J]. 应用光学, 2015, 36(1): 93-97. DOI: 10.5768/JAO201536.0105001
shu
Chen Fen-gjin, Su Xian-jun, Ma Sheng-xi, Sun Yong-yan, Yan Kai. Reliability of Ge-based MW antireflective films in hygrothermal environment[J]. Journal of Applied Optics, 2015, 36(1): 93-97. DOI: 10.5768/JAO201536.0105001
Citation: Chen Fen-gjin, Su Xian-jun, Ma Sheng-xi, Sun Yong-yan, Yan Kai. Reliability of Ge-based MW antireflective films in hygrothermal environment[J]. Journal of Applied Optics, 2015, 36(1): 93-97. DOI: 10.5768/JAO201536.0105001
shu

湿热环境对Ge基中波减反射膜可靠性的影响

  • 1.

    中国空空导弹研究院,河南 洛阳 471009;

  • 2.

    红外探测器技术航空科技重点实验室,河南 洛阳 471009

详细信息
    作者简介:

    陈凤金(1976-)，男，江西赣州人，高级工程师，主要从事红外探测器及光学薄膜技术研究。 Email:cfjin_mail@tom.com

    通讯作者:

    陈凤金(1976-)，男，江西赣州人，高级工程师，主要从事红外探测器及光学薄膜技术研究。 Email:cfjin_mail@tom.com

  • 中图分类号: TN305.8

Reliability of Ge-based MW antireflective films in hygrothermal environment

  • 1.

    China Airborne Missile Academy,Luoyang 471009,China;

  • 2.

    Aviation Key Laboratory of Science andTechnology on Infrared Detector,Luoyang 471009,China

摘要

    摘要
  • 摘要: 采用双面抛光的锗片为基底，镀制中波减反射膜，在湿热环境中分别持续24 h、224 h、324 h、424 h、524 h、、 1224 h之后，研究了湿热环境对Ge基中波减反射膜的光学特性、牢固性等可靠性的影响。实验结果表明：在现有工艺条件下，所镀制的Ge基中波减反射膜经不同时间的湿热环境之后，透过率逐渐变低，并出现CO2和H2O的特征吸收峰，吸收峰是减反射膜长时间持续在湿热环境下CO2和H2O含量增大所致；湿热环境1024 h后，边缘膜层开始出现脱落现象，1224 h后，膜层平均透过率低于85%。
    Abstract: Mid-wave(MW) antireflective films were coated on double-side polished Ge substrate, and the films were experimented in hygrothermal environment for sustaining 24 h,224 h,324 h,424 h,524 h,724 h,,1224 h,respectively. The effects of hygrothermal environment on the reliability including transmittance and adhesion of Gebased MW antireflective films were studied .The results indicate that , the transmittance of MW antireflective films becomes lower gradually after sustained in the hygrothermal environment, and the absorption peak of CO2 and H2O turnes up , resulted from the increase of the content of CO2 and H2O in the films sustained under hygrothermal environment for enough time; The fringe of film becomes desquamated after 1024 h in hygrothermal environment ,and from that time,the average transmittance is lower than 85%.
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出版历程
  • 收稿日期:  2014-05-19
  • 修回日期:  2014-10-15
  • 刊出日期:  2015-01-14

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